Methods and apparatus for reduced gate resistance finFET

ABSTRACT

Methods and apparatus for reduced gate resistance finFET. A metal gate transistor structure is disclosed including a plurality of semiconductor fins formed over a semiconductor substrate, the fins being arranged in parallel and spaced apart; a metal containing gate electrode formed over the semiconductor substrate and overlying a channel gate region of each of the semiconductor fins, and extending over the semiconductor substrate between the semiconductor fins; an interlevel dielectric layer overlying the gate electrode and the semiconductor substrate; and a plurality of contacts disposed in the interlevel dielectric layer and extending through the interlevel dielectric layer to the gate electrode; a low resistance metal strap formed over the interlevel dielectric layer and coupled to the gate electrode by the plurality of contacts; wherein the plurality of contacts are spaced apart from the channel gate regions of the semiconductor fins. Methods for forming the reduced gate finFET are disclosed.

BACKGROUND

As devices manufactured in semiconductor processes continue to shrink,certain characteristics of the smaller devices are less than optimal forcertain types of applications. In particular, high frequency or radiofrequency circuits, such as low noise amplifiers (LNAs) have demandingrequirements on transistors. As devices sizes continue to shrink, thetransistors of the advanced semiconductor processes exhibit increasedleakage as the gate oxides become thinner, also short-channel effectsmay reduce performance of planar devices in advanced processes.

One area that promises improvement in transistor performance at deepsubmicron process nodes is the use of metal gates. Replacingconventional polysilicon gates with metal gates in MOS transistors canprovide several advantages. Use of metal gates to replace thepolysilicon gates can increase performance by increasing the gate fieldeffect. Combining the metal gates with high-k gate dielectrics canimprove transistor performance still further. The drive current can beincreased, the source-drain leakage may be decreased, and the use of athicker dielectric layer can also reduce gate leakage.

However, the resistance of the metal gate in such devices increases overthe prior poly gates. Increased gate resistance has a negative impact inseveral areas. For example, the maximum oscillation frequency for adevice is inversely proportional to the gate resistance Rg. Further, thenoise factor for the device is directly proportional to the gateresistance. Thus, as the gate resistance increases, the noise factorincreases, which is undesirable, while the maximum frequency decreases,which is also undesirable.

Known approaches to reduce metal gate resistance in conventional MOS FETtransistors include providing a low resistance strap over the metalgate. For example a metal-1 strap can be formed over the gate material.Multiple contacts may be used to couple the low resistance metal strapto the metal gate. However, known semiconductor process approaches forthis structure can create defects such as etch damage in the metal gate.For the transistor, the use of the contacts over the active area canresult in threshold voltage (“Vt”) variance that is negatively impactsthe device performance, which is undesirable.

BRIEF DESCRIPTION OF THE FIGURES

For a more complete understanding of the present invention, and theadvantages thereof, reference is now made to the following descriptionstaken in conjunction with the accompanying drawings, in which:

FIG. 1 depicts in a simplified circuit schematic an amplifier circuitfor use with the embodiments;

FIG. 2 depicts in a three dimensional projection a bulk finFET devicefor use with the embodiments;

FIG. 3 depicts in a cross sectional view a silicon-on-insulator multiplefin finFET device for use with the embodiments;

FIG. 4 depicts in a cross-sectional view a multiple fin finFET structureembodiment;

FIG. 5 depicts in a cross-sectional view an alternative embodimentmultiple fin finFET structure;

FIG. 6 depicts in a top view an embodiment structure;

FIG. 7 depicts in a top view another embodiment structure;

FIG. 8 depicts in a cross-sectional view another embodiment structure;

FIG. 9 depicts in a block diagram an integrated circuit incorporatingthe embodiments; and

FIG. 10 depicts in a flow diagram a method embodiment.

The drawings, schematics and diagrams are illustrative and not intendedto be limiting, but are examples of embodiments of the invention, aresimplified for explanatory purposes, and are not drawn to scale.

DETAILED DESCRIPTION

The making and using of example and illustrative embodiments arediscussed in detail below. It should be appreciated, however, that thepresent disclosure provides many applicable inventive concepts that canbe embodied in a wide variety of specific contexts. The specificembodiments discussed are merely illustrative of specific ways to makeand use the disclosed concepts of the application, and do not limit thescope of the disclosure and do not limit the scope of the appendedclaims.

Embodiments of the present application, examples of which are nowdescribed in detail, provide novel methods and apparatus for reducedgate resistance in metal gate devices. FinFET transistors are used withthe metal gate and high-k dielectric. Multiple fin finFETs provide anopportunity to reduce the gate resistance using a plurality of contactsand a low resistance metal strap, while making contacts to the metalgate outside of the active areas of the finFET devices. In this manner,the problems observed with prior approaches are eliminated, while a lowresistance metal gate transistor is provided. The embodiments do notrequire substantial changes to the processes, or additional processingsteps and are compatible with existing semiconductor processes. Use ofthe embodiments can greatly reduce the gate resistance for a device,lowering the noise factor and increasing the maximum operating frequencyfor the device. The transistors formed using the embodiments areparticularly useful for radio frequency and high frequency applications,such as low noise amplifiers in RF circuits.

FIG. 1 depicts in a simple circuit diagram a low noise amplifier 10 foruse with the embodiments. In FIG. 1, the amplifier receives an input onnode In and outputs a signal on node Out. Transistors MP and MN3 biasthe circuit, while transistor MN2 provides a feedback path from theoutput back to the input. Transistor MN1 drives the output in responseto receiving the input at node In.

FIG. 2 depicts in a three dimensional projection view a finFETtransistor structure 20 for use with the embodiments. A substrate suchas a semiconductor substrate is provided, labeled “Bulk Substrate” whichmay be a silicon or germanium substrate, for example, and is patternedto form a semiconductor fin labeled “Fin”. The fin extends verticallyabove the surface of the bulk substrate. A dielectric or insulator layerlabeled “STI” (for “shallow trench isolation”) extends over the topsurface of the bulk substrate. The fin extends above the STI and has aheight “Hfin” and width “Wfin” in the exposed portion. The active areafor the finFET transistor will be formed at the surface of the threesides of the fin, that is, the gate width W for the transistor will bethe sum of the height “Hfin” twice, and the width “Wfin”. Thus, thedevice 20 of FIG. 2 is a “triple gate” finFET device. Alternatively,some finFET devices known as “double gate” devices may only form activeareas on the vertical portions of the fin. The use of the finFET allowsa longer gate width W in a given silicon area when compared to planardevices, as the gate width is increased by the three dimensional area ofthe fin, without increasing the silicon area. Further the transistorgate length L (which extends into the page in the view of FIG. 2) canstill scale down with the semiconductor process scaling, without acorresponding reduction in gate width, increasing the W/L ratio for thetransistor. Thus, the use of finFET devices has advantages that increaseover planar transistors with advances in semiconductor processing.

In FIG. 2, a gate electrode labeled “Gate” is formed over the fin “Fin”and the surface of the STI over the bulk substrate. In FIG. 2 the gateelectrode has a planar top surface, such as may be obtained when a gateelectrode is formed by a CMP process following an electroplating step.Alternatively the gate electrode could be formed by a conformaldeposition, and in that case, the top surface of the gate electrode“Gate” would not be planar but would track the fin sides and top andthen align with the substrate surface.

In order to form a FET transistor using the fin, source and drainregions are formed in the fin using, for example, ion implantation stepsto introduce dopant ions into the regions labeled “S” for source and “D”for drain. P-type and n-type finFET devices may be formed and used asPMOS and NMOS transistors. Since a semiconductor substrate is typicallydoped to one dopant type, for example p-type, doped well regions may beused to form the complementary dopant type, such as N-wells, and thefins may be formed over the wells. For a p-type transistor, which hasp-type source and drain regions, an N-well may be created in thesubstrate and fins formed over the N-well. Also, although not visible inthe figure, a gate dielectric is formed between the surface of the fin“Fin” and the gate electrode “Gate” to complete the transistorformation.

In an alternative structure for use with the embodiments, FIG. 3 depictsin a cross-sectional view a silicon-on-insulator or “SOI” embodimentfinFET transistor 30. Substrate 31 which may be a semiconductorsubstrate or other substrate including as non-limiting examples silicon,germanium, and the like, is shown with a field oxide or other insulator,such as STI, 35, deposited over it. Epitaxially grown fins 43 are shownformed on the surface of the insulator 35. The gate dielectric 37, gate39, and interlevel dielectric 41 are formed over the exposed sides andtops of the fins 43. Either the bulk substrate approach of FIG. 2 or theSOI approach of FIG. 3 may be used with the embodiments. In FIG. 3, thegate electrode 39 is conformally deposited over each of the fins 43. Agate dielectric 37, which may be a high-K gate dielectric, is formedover the fins beneath the gate electrode. In the embodiments, the gateelectrode is a metal gate, for example containing aluminum or tantalum,and may be formed by a replacement gate process or otherwise. Theinterlevel dielectric 41 may be an oxide, nitride, silicon oxynitride;carbons containing dielectric or other dielectrics such as are used forinterlevel isolation in semiconductor processes.

FIG. 4 depicts in a cross section a multiple fin finFET embodiment 40.In FIG. 4, the fins 43 are formed in a bulk substrate approach onsubstrate 31. The fins have portions that are covered by the gatedielectric 37 forming an active area on two vertical sides and acrossthe top of each fin. A common gate electrode 39 extends across and overeach of the fins 43. In the embodiments, the gate electrode 39 and gatedielectric 37 form a high-K metal gate structure. The gate electrode 39is a metal gate and may contain, for example, aluminum, tantalum,tungsten, molybdenum, titanium and other metals and may be produced by areplacement gate process, or by using a fully silicided process(siliciding an entire gate structure with a metal silicide). The gatedielectric 37 may be a high K gate dielectric suitable for use with ametal gate, including dielectrics with a dielectric constant K ofgreater than 3.8 (the dielectric constant of silicon oxide) andpreferably greater than about 10. Dielectrics that contain hafnium, forexample, may be used. Other examples include a hafnium containing oxidelayer, a tantalum containing oxide layer, an aluminum containing oxidelayer, any high K dielectric material, including without limitationswhere the dielectric constant K is greater than 10. In addition the gatedielectric may also be one of Ta205, Al2O3, PEOX, TEOS, or a combinationof any of these dielectrics.

In FIG. 4, the gate electrode 39 has a planar top surface such as isobtained using a chemical mechanical polishing (“CMP”) process. Asdescribed above, the resistance of the metal gate material is higherthan prior gate materials. While the use of the metal gate material inadvanced semiconductor processes does have certain advantages, theincreased gate resistance is a disadvantage, particularly when theresulting transistors are used in high frequency and radio frequencyapplications.

One metric that is important to consider is the thermal noise factor.The noise factor “F” is given by:

$\begin{matrix}{F = {1 + \frac{R_{g}}{R_{s}} + {\frac{\left( \frac{\gamma}{\alpha} \right)g_{m}}{R_{s}}\left( \frac{\omega}{\omega_{T}} \right)^{2}\left( {R_{s} + R_{g}} \right)^{2}}}} & {{Equation}\mspace{14mu} 1}\end{matrix}$

In Equation 1, the gate resistance Rg is seen in the numerator ofseveral of the factors, and the thermal noise is proportional to thegate resistance Rg. An increased gate resistance therefore has theundesirable effect of increasing the thermal noise.

Further, an important metric for high frequency devices is the maximumoscillation frequency, which is given by (note: fT is the cutofffrequency):

$\begin{matrix}{f_{\max} = \frac{fT}{2\sqrt{{g_{ds}\left( {R_{g} + R_{s}} \right)} + {2{\pi \cdot {fT} \cdot R_{g}}C_{gd}}}}} & {{Equation}\mspace{14mu} 2}\end{matrix}$

So as seen in Equation 2, the maximum frequency is reduced withincreasing gate resistance Rg. This means that unless the gateresistance Rg is reduced from the prior metal gate approaches, metalgate devices are not appropriate for some high frequency applications.

In FIG. 4, the gate resistance of the metal gate is reduced by use ofcontacts 51 to couple that gate electrode 39 to a lower resistance metalstrap, such as a metal-1 layer strap 53. The structure is arranged in aparticular way. Contacts 51 are formed in the interlevel dielectric(“ILD”) layer 51 which overlies the gate electrode 39. The contacts 51are conductors that are formed in openings in the ILD layer, and form avertical conductive connection to the metal-1 strap 53. Multiplecontacts are used, the number shown is only for illustration, forexample in an actual device 30, 40 or more may be used. Additionalmetal-1 straps and additional gate electrodes may be formed in parallelto the ones shown, of course these are not visible in the cross sectionof FIG. 4, but these will further reduce the gate resistance.

The contacts 51 are formed over non-channel gate areas 54 and are spacedfrom channel gate areas such as region 52 for the finFET devices. Inthis manner the etch damage to the gate electrode and the Vt variancesthat were seen in prior approaches are eliminated. Using the finFETmetal gate devices and using the contact placement of the embodimentsthus provides a lowered gate resistance in a metal gate device, withoutchanges to the semiconductor processing and without additional processsteps.

Note that in FIG. 4 the fins 43 and the gate electrode 39 form amultiple fin finFET device. This is accomplished by coupling source anddrain doped regions in the fins, not visible in this cross section, toone another. The number of fins can vary but may be as few as 3, up to10 or even 20 depending on the current drive and transistor area neededfor a particular application. Use of the finFET transistors inamplifiers and drivers may require large gain and substantial drivecurrents. These requirements may be satisfied by adding additional fins(increased source and drain area) and using metal gates coupled inparallel. Each of the gates used in the embodiments has contacts to oneor more metal straps, which lower the gate resistance. The straps may bea single metal piece or parallel strips, depending on the particularlayout and available space. The metal straps maybe metal-1 or anotherlow resistance conductor.

The embodiment of FIG. 4 is a double ended metal 1 structure. In FIG. 5,an alternative embodiment 50 is shown in cross section with a singleended metal 1 structure. The reference numerals for common elements fromFIG. 4 are the same in FIG. 5. The metal 1 strap 53 now is extended onlyat one end which forms a connection to the structure 50. The substrate,gate electrode, fins, ILD layer, contacts are arranged generally as inFIG. 4. FIG. 5 is also used to illustrate a spacing feature of theembodiments. The distance D2 illustrates a fin to fin spacing. The areabetween the fins provides the non-channel gate area for the embodiments.This area is a feature of a multiple fin finFET structure that allowsfor making the contact areas away from channel gate area. The spacing D1illustrates a spacing between the edge of the contact 51 closest to thefin 43 and the active area of the fin. This spacing D1 may have aminimum requirement in the design rules for a particular semiconductorprocess. In an example process, this spacing was between 8-12nanometers, while the contact area ranged from 26×26 nanometers squaredto 36×36 nanometers squared. However the minimum spacing, the actualsizes of the contacts, the width of the fins, and the width of the gateand metal-1 straps are all variable and may change with the requirementsof a particular design and the design rules of a particularsemiconductor process. Note that these and other variations arecontemplated as additional embodiments that fall within the scope of theappended claims. In the embodiments, the contacts are placed spaced fromthe active channel gate areas and are formed over non-channel gateareas, and the contacts couple a lower resistance metal to the gateelectrode to reduce the gate resistance for the metal gate finFETtransistor.

FIG. 6 illustrates, in a top view, a multiple fin finFET structure 60having a single ended gate electrode 39. In FIG. 6, common elements aredepicted and again common numerals are used for the elements shown inFIGS. 4 and 5, for example. Fins 43 are depicted arranged in paralleland spaced apart by a spacing Sfin, and having a width Wfin for eachfin. Contacts 51 are formed over the gate electrode 39 which lies overeach of the fins 43 and forms an active area with each of the fins.Region 52 may be, for example, a portion of a semiconductor substrate ora well region within a semiconductor substrate, such as a P-well orN-well region. Again contacts 51 lie over the gate electrode 53 inplaces apart from the active channel regions. Note that while the gate39 is depicted here as perpendicular to the fin direction, it need notbe exactly so, and can run diagonally or even in a nonlinear fashion aslong as the contacts are spaced from the channel region. These alternatearrangements form additional embodiments.

FIG. 7 illustrates an alternative embodiment in a top view depicting adouble ended gate electrode 39 for the structure, such as in FIG. 4.Contacts 51 are provided at each end of the gate electrode 39, and thegate electrode can be strapped to the overlying metal-1 or other metallayer strap at each end.

In both the embodiments of FIGS. 6, and 7, the fins 43 also have sourceand drain regions (not shown) formed outside and adjacent to the gateintersections and the fins and the gate form FET transistors. The sourceand drain regions would be coupled together to form a multiple finfinFET. Additional gate regions may also be provided, and if provided,would also have contacts 51 for coupling to a metal strap region.

FIG. 8 depicts in a cross sectional view an embodiment structure of amultiple fin finFET that has an alternative gate electrode, nowconformal gate electrode 38. Common elements are again given commonreference numerals and each of the elements of the substrate, fins, ILDlayer, and metal strap are given the same numerals as in FIG. 8. Gateelectrode 38 is now formed using conformal deposition, and it followsthe contours of the fins 43 and the substrate 31 between the fins.Contacts 82 now extend from the top of the ILD layer 41 to the gateelectrode 38 in the non-channel gate areas, which means these contacts82 are much longer than the contacts of the other embodiments describedabove. The multiple fins 43 again are coupled together to form a singlefinFET device and include source and drain regions that are not shown inthis figure. The contacts 82 are spaced apart from the channel gateareas of the fins 43 by a minimum spacing distance. The operation of thestructure 80 is the same as the prior embodiments; only the gateelectrode formation, and the contact formation, is different. Thestructure of FIG. 8 may be single ended, or double ended, as describedabove. Again the structure reduces the gate resistance for the metalgate of the high-K metal gate structure.

In typical applications, the number of fins can vary but may be about 10or greater. For a typical device, calculations that compare the reducedgate resistance to a similar metal gate structure formed without the useof the embodiments indicate that use of the embodiments results in areduction of the gate resistance of between about 50% and 97%, with thehighest reduction measured for a greater number of fins, and for thesingle ended embodiments. The same calculation was also done fordifferent sheet resistances for the metal gate electrode, the reductionof the gate resistance using the embodiments ranged from about 82% toabout 97%, the higher results were for a single ended embodiment using asheet resistance of about 100 Ohms/square. So the biggest reductionswere achieved when high sheet resistance metal gates were used with theembodiments.

The embodiment transistor structures using the multiple fin finFETs maybe used in a wide variety of devices. As indicated above, the use of theembodiments is particularly applicable to applications where frequencyis higher, such as radio frequency (RF) and high frequency circuits.Oscillators, low noise amplifiers, radio receivers/transmitters and likecircuits may be implemented using the high-K metal gate devices of theembodiments.

FIG. 9 depicts in a simple block diagram an example integrated circuitIC 87 that includes, for illustration, two low noise amplifiers LNA1 andLNA2, user logic, and a data converter such as an analog to digitalconverter or a digital to analog converter (ADC/DAC). The low gateresistance metal gate finFET structure described above may be used toimplement the transistors in one or more of these functions in theintegrated circuit, thereby improving the performance obtained.

FIG. 10 illustrates in a flow diagram a method embodiment. In step 21,multiple fins of a finFET transistor are formed on a semiconductorsubstrate. In step 23, a metal gate electrode is formed overlying achannel gate region of each of the multiple fins. In step 25, aninterlevel dielectric layer is formed over the gate electrode. In step27 a plurality of contacts are formed extending through the interleveldielectric to the gate electrode, the contacts spaced apart from thechannel gate region of the fins. At step 29, the contacts are coupled toa low resistance metal strap overlying the interlevel dielectric layerto form a low resistance metal gate finFET transistor.

In an example embodiment, a metal gate transistor structure is providedincluding a plurality of semiconductor fins formed over a semiconductorsubstrate, the fins being arranged in parallel and spaced apart; a metalcontaining gate electrode formed over the semiconductor substrate andoverlying a channel gate region of each of the semiconductor fins, andextending over the semiconductor substrate between the semiconductorfins; an interlevel dielectric layer overlying the gate electrode andthe semiconductor substrate; a plurality of contacts disposed in theinterlevel dielectric layer and extending through the interleveldielectric layer to the gate electrode; a low resistance metal strapformed over the interlevel dielectric layer and coupled to the gateelectrode by the plurality of contacts; and wherein the plurality ofcontacts are spaced apart from the channel gate regions of thesemiconductor fins. In a further additional embodiment, a high-K gatedielectric is disposed between the gate electrode and the semiconductorfins.

In still a further embodiment, the metal gate transistor structureincludes the gate dielectric that has a dielectric constant of greaterthan about 10. In yet another embodiment, the metal gate transistorstructure is provided wherein the gate dielectric is one of nitrogencontaining oxide layer, a hafnium containing oxide layer, a tantalumcontaining oxide layer, and an aluminum containing oxide layer.

In still further embodiments, the metal gate transistor structureincludes source and drain regions formed adjacent the channel gateregions for each of the plurality of semiconductor fins and theseregions are further coupled together to form a single finFET transistor.

In another embodiment, in the metal gate transistor structure, whereinthe gate electrode includes a metal from the group of aluminum,tantalum, tungsten, molybdenum, and titanium.

In yet another embodiment the semiconductor fin include source and drainregions formed adjacent to the channel gate regions.

In a further embodiment, in the metal gate transistor structure theplurality of contacts are each formed over the gate electrode in an areabetween the semiconductor fins.

In a further embodiment, in the metal gate transistor structure theplurality of contacts are each spaced from the channel gate region ofthe fins by a minimum spacing distance. In yet another embodiment theminimum spacing distance is at least 8 nanometers.

In another embodiment of the metal gate transistor structure the numberof semiconductor fins is greater than about 10. In still a furtherembodiment, the number of contacts is greater than about 20.

In another embodiment, an integrated circuit is provided including atleast one circuit formed of a plurality of metal gate transistors, eachfurther including a plurality of semiconductor fins formed over asemiconductor substrate, the semiconductor fins being arranged inparallel and spaced apart; a metal containing gate electrode formed overthe semiconductor substrate and overlying a channel gate region of eachof the semiconductor fins and extending over the semiconductor substratebetween the semiconductor fins; an interlevel dielectric layer overlyingthe metal containing gate electrode and the semiconductor substrate; aplurality of contacts disposed in the interlevel dielectric layer andextending through the interlevel dielectric layer to the metalcontaining gate electrode; and a low resistance metal strap formed overthe interlevel dielectric layer and coupled to the metal containing gateelectrode by the plurality of contacts.

In a method embodiment, the method includes forming multiplesemiconductor fins over a semiconductor substrate, the multiplesemiconductor fins spaced apart; forming a metal containing gateelectrode overlying a channel gate region of each of the semiconductorfins, and extending over the semiconductor substrate between thesemiconductor fins; forming an interlevel dielectric layer overlying themetal containing gate electrode and the semiconductor substrate; forminga plurality of contacts extending through the interlevel dielectriclayer to the metal containing gate electrode, each of the plurality ofcontacts spaced from the channel gate regions of the semiconductor fins;and forming a metal strap layer over the interlevel dielectric layercoupled to the metal containing gate electrode through the plurality ofcontacts.

The scope of the present application is not intended to be limited tothe particular illustrative embodiments of the structures, methods andsteps described in the specification. As one of ordinary skill in theart will readily appreciate from the disclosure of the exampleembodiments, processes, or steps, presently existing or later to bedeveloped, that perform substantially the same function or achievesubstantially the same result as the corresponding embodiments describedherein may be utilized and these alternatives are contemplated as partof the embodiments. Accordingly, the appended claims are intended toinclude within their scope such processes or steps.

What is claimed is:
 1. A metal gate transistor structure, comprising: aplurality of semiconductor fins formed over a semiconductor substrate,the fins being arranged in parallel and spaced apart; a metal containinggate electrode formed over the semiconductor substrate and overlaps achannel gate region of each of the semiconductor fins in a top view; aninterlevel dielectric layer overlying the gate electrode and thesemiconductor substrate; a plurality of contacts disposed in theinterlevel dielectric layer and extending through the interleveldielectric layer to the gate electrode; and a low resistance metal strapformed over the interlevel dielectric layer and coupled to the gateelectrode by the plurality of contacts; wherein the plurality ofcontacts are spaced apart from the channel gate regions of thesemiconductor fins.
 2. The metal gate transistor structure of claim 1and further comprising: a high-K gate dielectric disposed between thegate electrode and the semiconductor fins.
 3. The metal gate transistorstructure of claim 2, wherein the gate dielectric has a dielectricconstant of greater than about
 10. 4. The metal gate transistorstructure of claim 2, wherein the gate dielectric is one selected fromthe group consisting essentially of a nitrogen containing oxide layer, ahafnium containing oxide layer, a tantalum containing oxide layer, or analuminum containing oxide layer.
 5. The metal gate transistor structureof claim 4, wherein source and drain regions are formed adjacent thechannel gate regions for each of the plurality of semiconductor fins andare further coupled together to form a single finFET transistor.
 6. Themetal gate transistor structure of claim 1, wherein the gate electrodecomprises a metal one selected from the group consisting essentially ofaluminum, tantalum, tungsten, molybdenum, and titanium.
 7. The metalgate transistor structure of claim 1, wherein the semiconductor finsfurther comprise source and drain regions formed adjacent to the channelgate regions.
 8. The metal gate transistor structure of claim 1, whereinthe plurality of contacts are each formed over the gate electrode in anarea between the semiconductor fins.
 9. The metal gate transistorstructure of claim 1, wherein the plurality of contacts are each spacedfrom the channel gate region of the fins by a minimum spacing distance.10. The metal gate transistor structure of claim 9, wherein the minimumspacing distance is at least 8 nanometers.
 11. The metal gate transistorof claim 1, wherein the number of semiconductor fins is greater thanabout
 10. 12. The metal gate transistor of claim 11, wherein the numberof contacts is greater than about
 20. 13. An integrated circuitcomprising: at least one circuit formed of a plurality of metal gatetransistors, each further comprising: a plurality of semiconductor finsformed over a semiconductor substrate, the semiconductor fins beingarranged in parallel and spaced apart; a metal containing gate electrodeformed over the semiconductor substrate and overlaps a channel gateregion of each of the semiconductor fins in a top view; and extendingover the semiconductor substrate between the semiconductor fins; aninterlevel dielectric layer overlying the metal containing gateelectrode and the semiconductor substrate; a plurality of contactsdisposed in the interlevel dielectric layer and extending through theinterlevel dielectric layer to the metal containing gate electrode; anda low resistance metal strap formed over the interlevel dielectric layerand coupled to the metal containing gate electrode by the plurality ofcontacts.
 14. The integrated circuit of claim 13, wherein the metalcontaining gate electrode further comprises one selected from the groupconsisting essentially of aluminum, tantalum, tungsten, molybdenum, andtitanium.
 15. The integrated circuit of claim 13, and further comprisinga high-K gate dielectric disposed between the metal containing gateelectrode and the channel gate region of each of the semiconductor fins.16. The integrated circuit of claim 13, wherein for each of the metalgate transistors, the plurality of contacts are each spaced from thechannel gate region of the semiconductor fins by a minimum spacingdistance.